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Glancing Angle Deposition of Thin Films : Engineering the Nanoscale.
This book provides a highly practical treatment of GLAD technology, gathering existing procedures, methodologies, and experimental designs into a single, cohesive volume which will be useful both as a ready reference for those in the field and as a definitive guide for those entering it. It covers:...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Hoboken :
Wiley,
2014.
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| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Glancing Angle Deposition of Thin Films; Contents; Series Preface; Preface; 1 Introduction: Glancing Angle Deposition Technology; 1.1 Nanoscale engineering and glancing angle deposition; 1.2 GLAD-vantages; 1.2.1 Nanoscale morphology control; 1.2.2 Broad material compatibility; 1.2.3 Novel thin-film material properties; 1.2.4 Compatibility with standard microfabrication processes; 1.2.5 Scalable fabrication method; 1.3 The roots of glancing angle deposition: oblique deposition; 1.4 The importance of experimental calibration; 1.5 Computer simulations of glancing angle deposition growth.
- 3.2.8 Design parameter summary3.3 Seed fabrication; 3.3.1 Conventional techniques; 3.3.2 Unconventional techniques; 3.4 Advanced control of local shadowing environment; 3.4.1 Preventing bifurcation: slow-corner motion; 3.4.2 Preventing broadening: phisweep and substrate swing; References; 4 Properties and Characterization Methods; 4.1 Introduction; 4.2 Structural analysis with electron microscopy; 4.2.1 Practical aspects; 4.2.2 Scanning electron microscope image analysis; 4.2.3 Three-dimensional column imaging: tomographic sectioning.