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Glancing Angle Deposition of Thin Films : Engineering the Nanoscale.
This book provides a highly practical treatment of GLAD technology, gathering existing procedures, methodologies, and experimental designs into a single, cohesive volume which will be useful both as a ready reference for those in the field and as a definitive guide for those entering it. It covers:...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Hoboken :
Wiley,
2014.
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| Temas: | |
| Acceso en línea: | Texto completo |
MARC
| LEADER | 00000cam a2200000 i 4500 | ||
|---|---|---|---|
| 001 | EBOOKCENTRAL_ocn883570105 | ||
| 003 | OCoLC | ||
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| 006 | m o d | ||
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| 008 | 140712s2014 xx ob 001 0 eng d | ||
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| 050 | 4 | |a T174.7 .H39 2014 | |
| 082 | 0 | 4 | |a 621.38152 |
| 049 | |a UAMI | ||
| 100 | 1 | |a Hawkeye, Matthew M. | |
| 245 | 1 | 0 | |a Glancing Angle Deposition of Thin Films : |b Engineering the Nanoscale. |
| 260 | |a Hoboken : |b Wiley, |c 2014. | ||
| 300 | |a 1 online resource (316 pages) | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 588 | 0 | |a Print version record. | |
| 504 | |a Includes bibliographical references at the end of each chapters and index. | ||
| 505 | 0 | |a Glancing Angle Deposition of Thin Films; Contents; Series Preface; Preface; 1 Introduction: Glancing Angle Deposition Technology; 1.1 Nanoscale engineering and glancing angle deposition; 1.2 GLAD-vantages; 1.2.1 Nanoscale morphology control; 1.2.2 Broad material compatibility; 1.2.3 Novel thin-film material properties; 1.2.4 Compatibility with standard microfabrication processes; 1.2.5 Scalable fabrication method; 1.3 The roots of glancing angle deposition: oblique deposition; 1.4 The importance of experimental calibration; 1.5 Computer simulations of glancing angle deposition growth. | |
| 505 | 8 | |a 3.2.8 Design parameter summary3.3 Seed fabrication; 3.3.1 Conventional techniques; 3.3.2 Unconventional techniques; 3.4 Advanced control of local shadowing environment; 3.4.1 Preventing bifurcation: slow-corner motion; 3.4.2 Preventing broadening: phisweep and substrate swing; References; 4 Properties and Characterization Methods; 4.1 Introduction; 4.2 Structural analysis with electron microscopy; 4.2.1 Practical aspects; 4.2.2 Scanning electron microscope image analysis; 4.2.3 Three-dimensional column imaging: tomographic sectioning. | |
| 520 | |a This book provides a highly practical treatment of GLAD technology, gathering existing procedures, methodologies, and experimental designs into a single, cohesive volume which will be useful both as a ready reference for those in the field and as a definitive guide for those entering it. It covers: History and development of GLAD techniquesProperties and Characterization of GLAD fabricated filmsDesign and engineering of optical GLAD films including fabrication and testingPost-deposition processing and integrationDeposition systems for GLAD fabr. | ||
| 590 | |a ProQuest Ebook Central |b Ebook Central Academic Complete | ||
| 650 | 0 | |a Nanotechnology. | |
| 650 | 0 | |a Chemical vapor deposition. | |
| 650 | 0 | |a Nanoelectromechanical systems |x Design and construction. | |
| 650 | 6 | |a Dépôt chimique en phase vapeur. | |
| 650 | 6 | |a Nanotechnologie. | |
| 650 | 7 | |a Chemical vapor deposition |2 fast | |
| 650 | 7 | |a Nanotechnology |2 fast | |
| 700 | 1 | |a Taschuk, Michael T. | |
| 700 | 1 | |a Brett, Michael J. | |
| 758 | |i has work: |a Glancing Angle Deposition of Thin Films [electronic resource] (Text) |1 https://id.oclc.org/worldcat/entity/E39PCXy3P3xqdC7KQbXGxPK6Dm |4 https://id.oclc.org/worldcat/ontology/hasWork | ||
| 776 | 0 | 8 | |i Print version: |a Hawkeye, Matthew M. |t Glancing Angle Deposition of Thin Films : Engineering the Nanoscale. |d Hoboken : Wiley, ©2014 |z 9781118847565 |
| 856 | 4 | 0 | |u https://ebookcentral.uam.elogim.com/lib/uam-ebooks/detail.action?docID=1729070 |z Texto completo |
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