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NEMS/MEMS Technology and Devices, ICMAT2011 : Selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT 2011), Symposium G: NEMS/MEMS and microTAS, 26 June to 1 July 2011, Suntec, Singapore /
The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processe...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor Corporativo: | |
| Formato: | Electrónico Congresos, conferencias eBook |
| Idioma: | Inglés |
| Publicado: |
Switzerland :
Trans Tech Publications Ltd,
2011.
|
| Colección: | Advanced materials research ;
vol. 254. |
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
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| 245 | 0 | 0 | |a NEMS/MEMS Technology and Devices, ICMAT2011 : |b Selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT 2011), Symposium G: NEMS/MEMS and microTAS, 26 June to 1 July 2011, Suntec, Singapore / |c edited by Lynn Khine and Julius M. Tsai. |
| 260 | |a Switzerland : |b Trans Tech Publications Ltd, |c 2011. | ||
| 300 | |a 1 online resource (236 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 1 | |a Advanced Materials Research, |x 1662-8985 ; |v Vol. 254 | |
| 504 | |a Includes bibliographical references and index. | ||
| 520 | |a The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic. | ||
| 505 | 0 | |a NEMS/MEMS Technology and Devices, ICMAT2011; Preface; Table of Contents; Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors; Thick-Film Deposition of High-Viscous Liquid Photopolymer; Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application; Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever; Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure; Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force | |
| 505 | 8 | |a A Static Micromixer Inspired from Fractal-Like Natural Flow SystemsAlN Actuator for Tunable RFMEMS Capacitor; GEMS: A MEMS-Based Way for the Innervation of Materials; On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems; Design Consideration of Membrane Structure for Thermal Actuated Micropump; Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator; Fabrication of a Peltier Device Based on InSb and SbTe Thin Films; Gapfill Study of Polyimides for MEMS Applications | |
| 505 | 8 | |a A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film TransistorWireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications; Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator; FBAR Resonators with Sufficient High Q for RF Filter Implementation; Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators; Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis; Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement | |
| 505 | 8 | |a Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid FilmA New Peltier Device with a Coaxial Thermocouple; A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device; Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography; Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches; Double-Step Plasma Etching for SiO2 Microcantilever Release; Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators | |
| 590 | |a ProQuest Ebook Central |b Ebook Central Academic Complete | ||
| 650 | 0 | |a Nanoelectromechanical systems |v Congresses. | |
| 650 | 0 | |a Microelectromechanical systems |v Congresses. | |
| 650 | 6 | |a Nanosystèmes électromécaniques |v Congrès. | |
| 650 | 6 | |a Microsystèmes électromécaniques |v Congrès. | |
| 650 | 7 | |a Microelectromechanical systems |2 fast | |
| 650 | 7 | |a Nanoelectromechanical systems |2 fast | |
| 655 | 7 | |a Conference papers and proceedings |2 fast | |
| 711 | 2 | |a Selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT 2011), Symposium G: NEMS/MEMS and microTAS, 26 June to 1 July 2011, Suntec, Singapore. | |
| 776 | 0 | 8 | |i Erscheint auch als: |n Druck-Ausgabe |a International Conference on Materials for Advanced Technologies. NEMS/MEMS technology and devices . |t Selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore |
| 830 | 0 | |a Advanced materials research ; |v vol. 254. |x 1662-8985 | |
| 856 | 4 | 0 | |u https://ebookcentral.uam.elogim.com/lib/uam-ebooks/detail.action?docID=1872609 |z Texto completo |
| 938 | |a Trans Tech Publications, Ltd |b TRAN |n 10.4028/www.scientific.net/AMR.254 | ||
| 938 | |a EBL - Ebook Library |b EBLB |n EBL1872609 | ||
| 994 | |a 92 |b IZTAP | ||