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Ion Implantation and Activation - Volume 2.
Ion Implantation and Activation presents the derivation process of related models in a comprehensive step by step manner starting from the fundamental processes and moving up into the more advanced theories. Chapters in the book explain, in depth, various topics such as Pearson functions, LSS theory...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Sharjah :
Bentham Science Publishers,
2013.
|
| Colección: | Ion Implantation and Activation.
|
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
| LEADER | 00000cam a2200000 4500 | ||
|---|---|---|---|
| 001 | EBOOKCENTRAL_ocn865331834 | ||
| 003 | OCoLC | ||
| 005 | 20240329122006.0 | ||
| 006 | m o d | ||
| 007 | cr |n||||||||| | ||
| 008 | 131214s2013 xx ob 001 0 eng d | ||
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| 019 | |a 961551256 |a 962578001 | ||
| 020 | |a 9781608057900 | ||
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| 020 | |z 9781608057917 | ||
| 029 | 1 | |a AU@ |b 000066756579 | |
| 029 | 1 | |a DEBBG |b BV044065177 | |
| 029 | 1 | |a DEBSZ |b 431573255 | |
| 029 | 1 | |a NZ1 |b 15912643 | |
| 035 | |a (OCoLC)865331834 |z (OCoLC)961551256 |z (OCoLC)962578001 | ||
| 050 | 4 | |a QC702.7.I55 |b S89 2013eb | |
| 082 | 0 | 4 | |a 530.4 |
| 049 | |a UAMI | ||
| 100 | 1 | |a Suzuki, Kunihiro. | |
| 245 | 1 | 0 | |a Ion Implantation and Activation - Volume 2. |
| 260 | |a Sharjah : |b Bentham Science Publishers, |c 2013. | ||
| 300 | |a 1 online resource (171 pages) | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 1 | |a Ion Implantation and Activation | |
| 505 | 0 | |a Cover; Title; EUL; Contents; Preface; Acknowledgement; Chapter 01; Chapter 02; Chapter 03; Chapter 04; Chapter 05; Chapter 06; Chapter 07; Chapter 08; Chapter 09; Index. | |
| 520 | |a Ion Implantation and Activation presents the derivation process of related models in a comprehensive step by step manner starting from the fundamental processes and moving up into the more advanced theories. Chapters in the book explain, in depth, various topics such as Pearson functions, LSS theory, Monte Carlo simulations, Edgeworth Polynomials and much more. This book provides advanced engineering and physics students and researchers with complete and coherent coverage of modern semiconductor process modeling. | ||
| 588 | 0 | |a Print version record. | |
| 504 | |a Includes bibliographical references and index. | ||
| 590 | |a ProQuest Ebook Central |b Ebook Central Academic Complete | ||
| 650 | 0 | |a Ion implantation. | |
| 650 | 0 | |a Ion accelerators. | |
| 650 | 6 | |a Ions |x Implantation. | |
| 650 | 6 | |a Accélérateurs d'ions. | |
| 650 | 7 | |a Ion accelerators |2 fast | |
| 650 | 7 | |a Ion implantation |2 fast | |
| 776 | 0 | 8 | |i Print version: |a Suzuki, Kunihiro. |t Ion Implantation and Activation - Volume 2. |d Sharjah : Bentham Science Publishers, ©2013 |z 9781608057917 |
| 830 | 0 | |a Ion Implantation and Activation. | |
| 856 | 4 | 0 | |u https://ebookcentral.uam.elogim.com/lib/uam-ebooks/detail.action?docID=1572232 |z Texto completo |
| 936 | |a BATCHLOAD | ||
| 938 | |a Bentham Science Publisher |b BENT |n 9781608057900 | ||
| 938 | |a ProQuest Ebook Central |b EBLB |n EBL1572232 | ||
| 938 | |a ebrary |b EBRY |n ebr10817741 | ||
| 938 | |a YBP Library Services |b YANK |n 11419105 | ||
| 994 | |a 92 |b IZTAP | ||