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Sputtering materials for VLSI and thin film devices /
An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. Sarkar reviews essential microelectronics industry topics, including: hist...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Norwich, N.Y. :
William Andrew,
2011.
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| Temas: | |
| Acceso en línea: | Texto completo |