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Metal impurities in silicon-device fabrication /
Metal Impurities in Silicon-Device Fabrication treats the transition-metal impurities generated during silicon sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey given of their impact on device performance. The specific properties of mai...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Berlin, Heidelberg :
Springer Berlin Heidelberg,
1995.
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| Colección: | Springer series in materials science ;
24. |
| Temas: | |
| Acceso en línea: | Texto completo |
| Sumario: | Metal Impurities in Silicon-Device Fabrication treats the transition-metal impurities generated during silicon sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey given of their impact on device performance. The specific properties of main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. Finally, impurity gettering is studied along with modern techniques to determine gettering efficiency. In all of these subjects, reliable and up-to-date data are presented. The monograph provides a thorough review of the results of recent scientific investigations, as well as of the relevant data and properties of the various metal impurities in silicon. |
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| Descripción Física: | 1 online resource (ix, 216 pages) : 47 illustrations. |
| Bibliografía: | Includes bibliographical references (pages 201-214) and index. |
| ISBN: | 9783642975936 3642975933 3540583173 9783540583172 0387583173 9780387583174 |
| ISSN: | 0933-033X ; |