Semiconductor Strain Metrology : Principles and Applications.
This book surveys the major and newly developed techniques for semiconductor strain metrology. This e-book employs a tutorial approach to explain the principles and applications of each technique specifically tailored for graduate students and postdoctoral researchers.
Clasificación: | Libro Electrónico |
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Autor principal: | |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Sharjah :
Bentham Science Publishers,
2012.
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Temas: | |
Acceso en línea: | Texto completo |
Sumario: | This book surveys the major and newly developed techniques for semiconductor strain metrology. This e-book employs a tutorial approach to explain the principles and applications of each technique specifically tailored for graduate students and postdoctoral researchers. |
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Descripción Física: | 1 online resource (141 pages) |
ISBN: | 9781608053599 1608053598 |