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Substrate Surface Preparation Handbook.
Substrate Surface Preparation serves as a practical, one-stop reference, covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits. This hands-on resource offers you detailed guidance in the entir...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Norwood :
Artech House,
2011.
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| Colección: | Artech House applied photonics series.
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| Temas: | |
| Acceso en línea: | Texto completo |
| Sumario: | Substrate Surface Preparation serves as a practical, one-stop reference, covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits. This hands-on resource offers you detailed guidance in the entire substrate surface preparation process, from lapping and polishing ... to specialized techniques and surface finishing. Supported with over 125 illustrations, this unique book provides you with a complete understanding of important maintenance methods and the full range of equipment available in the fi. |
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| Notas: | Glossary. |
| Descripción Física: | 1 online resource (196 pages) |
| Bibliografía: | Includes bibliographical references and index. |
| ISBN: | 9781608072149 1608072142 1523117591 9781523117598 9781608072132 1608072134 |