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A guide to hands-on MEMS design and prototyping /
"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fa...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Cambridge, UK ; New York :
Cambridge University Press,
2011.
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| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Preface; 1 Introduction; 2 Micromechanics; 3 Electrostatic Actuation; 4 Optical MEMS; 5 Thermal MEMS; 6 Fluidic MEMS; 7 Package and Test; 8 From Prototype to Product: MEMS Deformable Mirrors for Adaptive Optics.