Digital holography for MEMS and microsystem metrology /

Approaching the topic of digital holography from the practical perspective of industrial inspection, "Digital Holography for MEMS and Microsystem Metrology" describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, desi...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Asundi, Anand
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Chichester : Wiley, Ã2011.
Colección:Wiley microsystem and nanotechnology series.
Temas:
Microelectromechanical systems > Measurement.
Microelectronics > Measurement.
Holographic testing.
Essais holographiques.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
Holographic testing
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