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|a UAMI
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1 |
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|a Ree, Moonhor.
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| 245 |
1 |
0 |
|a Low-k nanoporous interdielectrics :
|b materials, thin film fabrications, structures and properties /
|c authors, Moonhor Ree, Jinhwan Yoon, Kyuyoung Heo.
|
| 264 |
|
1 |
|a Hauppauge, N.Y. :
|b Nova Science Publishers,
|c c2010.
|
| 300 |
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|a 1 online resource
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|a text
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1 |
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|a Nanotechnology science and technology
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|a Includes bibliographical references (pages [51]-61) and index.
|
| 588 |
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|a Description based on print version record.
|
| 505 |
0 |
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|a PREFACE; I INTRODUCTION; II RECENT DEVELOPMENTS IN LOW-K NANOPOROUS DIELECTRICS; III CHARACTERIZATION OF PORE STRUCTURES; IV CONCLUSIONS; REFERENCES; INDEX.
|
| 546 |
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|a English.
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|a ProQuest Ebook Central
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|b EBSCO eBook Subscription Academic Collection - Worldwide
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|
0 |
|a Dielectric films.
|
| 650 |
|
0 |
|a Microelectronics
|x Materials.
|
| 650 |
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0 |
|a Porous materials.
|
| 650 |
|
0 |
|a Interconnects (Integrated circuit technology)
|
| 650 |
|
6 |
|a Couches diélectriques.
|
| 650 |
|
6 |
|a Microélectronique
|x Matériaux.
|
| 650 |
|
6 |
|a Interconnexions (Technologie des circuits intégrés)
|
| 650 |
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7 |
|a TECHNOLOGY & ENGINEERING
|x Electronics
|x Microelectronics.
|2 bisacsh
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|a TECHNOLOGY & ENGINEERING
|x Electronics
|x Digital.
|2 bisacsh
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7 |
|a Dielectric films
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7 |
|a Interconnects (Integrated circuit technology)
|2 fast
|
| 650 |
|
7 |
|a Microelectronics
|x Materials
|2 fast
|
| 650 |
|
7 |
|a Porous materials
|2 fast
|
| 700 |
1 |
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|a Yoon, Jinhwan.
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| 700 |
1 |
|
|a Heo, Kyuyoung.
|
| 776 |
0 |
8 |
|i Print version:
|t Low-k nanoporous interdielectrics
|d Hauppauge, N.Y. : Nova Science Publishers, c2010.
|z 9781616687496 (softcover)
|w (DLC) 2010016713
|
| 830 |
|
0 |
|a Nanotechnology science and technology series.
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|u https://ebookcentral.uam.elogim.com/lib/uam-ebooks/detail.action?docID=3019998
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