Fundamental principles of optical lithography : the science of microfabrication /

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used...

Descripción completa

Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Mack, Chris A.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, ©2007.
Temas:
Integrated circuits > Design and construction.
Microlithography > Industrial applications.
Circuits intégrés > Conception et construction.
Microlithographie > Applications industrielles.
TECHNOLOGY & ENGINEERING > Imaging Systems.
Integrated circuits > Design and construction
Microlithography > Industrial applications
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Fundamental Principles of Optical Lithography: The Science of Microfabrication; Contents; Preface; 1: Introduction to Semiconductor Lithography; 2: Aerial Image Formation -The Basics; 3: Aerial Image Formation -The Details; 4: Imaging in Resist: Standing Waves and Swing Curves; 5: Conventional Resists: Exposure and Bake Chemistry; 6: Chemically Amplified Resists: Exposure and Bake Chemistry; 7: Photoresist Development; 8: Lithographic Control in Semiconductor Manufacturing; 8: Lithographic Control in Semiconductor Manufacturing.

Ejemplares similares