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Fundamental principles of optical lithography : the science of microfabrication /

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Mack, Chris A.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, ©2007.
Temas:
Acceso en línea:Texto completo

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