Cargando…
Fundamental principles of optical lithography : the science of microfabrication /
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Chichester, West Sussex, England ; Hoboken, NJ, USA :
Wiley,
©2007.
|
| Temas: | |
| Acceso en línea: | Texto completo |