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Fundamental principles of optical lithography : the science of microfabrication /
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Chichester, West Sussex, England ; Hoboken, NJ, USA :
Wiley,
©2007.
|
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
| LEADER | 00000cam a2200000Ma 4500 | ||
|---|---|---|---|
| 001 | EBOOKCENTRAL_ocn608624290 | ||
| 003 | OCoLC | ||
| 005 | 20240329122006.0 | ||
| 006 | m o d | ||
| 007 | cr cn||||||||| | ||
| 008 | 071026s2007 enka ob 001 0 eng d | ||
| 040 | |a MERUC |b eng |e pn |c MERUC |d E7B |d OCLCQ |d YDXCP |d EBLCP |d BTCTA |d IDEBK |d N$T |d OCLCQ |d OCLCF |d OCLCQ |d DEBSZ |d OCLCQ |d AZK |d AGLDB |d MOR |d PIFAG |d ZCU |d OCLCQ |d MERUC |d OCLCQ |d U3W |d STF |d WRM |d OCLCQ |d VTS |d ICG |d INT |d NRAMU |d VT2 |d OCLCQ |d WYU |d OCLCQ |d DKC |d OCLCQ |d M8D |d HS0 |d OCLCQ |d AJS |d UKAHL |d OCLCO |d OCLCQ |d OCLCO |d OCLCL | ||
| 015 | |a GBA791483 |2 bnb | ||
| 016 | 7 | |z 014276990 |2 Uk | |
| 019 | |a 243547407 |a 536152267 |a 609849610 |a 647782698 |a 746577211 |a 961549586 |a 962603108 |a 988528171 |a 992059753 |a 1037900573 |a 1038666935 |a 1045530808 |a 1064112858 |a 1081277385 |a 1109241493 | ||
| 020 | |a 9780470723869 |q (electronic bk.) | ||
| 020 | |a 0470723866 |q (electronic bk.) | ||
| 020 | |a 0470723874 | ||
| 020 | |a 9780470723876 | ||
| 020 | |a 1282348817 | ||
| 020 | |a 9781282348813 | ||
| 020 | |a 9786612348815 | ||
| 020 | |a 661234881X | ||
| 020 | |a 1119965071 | ||
| 020 | |a 9781119965077 | ||
| 020 | |z 9780470018934 | ||
| 020 | |z 0470018933 | ||
| 020 | |z 9780470727300 |q (pbk.) | ||
| 020 | |z 0470727306 |q (pbk.) | ||
| 029 | 1 | |a AU@ |b 000051567133 | |
| 029 | 1 | |a AU@ |b 000059228277 | |
| 029 | 1 | |a AU@ |b 000060065821 | |
| 029 | 1 | |a DEBBG |b BV043148006 | |
| 029 | 1 | |a DEBBG |b BV044140085 | |
| 029 | 1 | |a DEBSZ |b 421421983 | |
| 029 | 1 | |a DEBSZ |b 430792700 | |
| 029 | 1 | |a NZ1 |b 13340422 | |
| 035 | |a (OCoLC)608624290 |z (OCoLC)243547407 |z (OCoLC)536152267 |z (OCoLC)609849610 |z (OCoLC)647782698 |z (OCoLC)746577211 |z (OCoLC)961549586 |z (OCoLC)962603108 |z (OCoLC)988528171 |z (OCoLC)992059753 |z (OCoLC)1037900573 |z (OCoLC)1038666935 |z (OCoLC)1045530808 |z (OCoLC)1064112858 |z (OCoLC)1081277385 |z (OCoLC)1109241493 | ||
| 050 | 4 | |a TK7874 |b .M196 2007eb | |
| 072 | 7 | |a TEC |x 015000 |2 bisacsh | |
| 072 | 7 | |a TJFP |2 bicssc | |
| 072 | 0 | |a PH | |
| 072 | 0 | |a TG | |
| 072 | 0 | |a TJ | |
| 072 | 0 | |a TTB | |
| 082 | 0 | 4 | |a 621.3815/31 |2 22 |
| 049 | |a UAMI | ||
| 100 | 1 | |a Mack, Chris A. | |
| 245 | 1 | 0 | |a Fundamental principles of optical lithography : |b the science of microfabrication / |c Chris Mack. |
| 260 | |a Chichester, West Sussex, England ; |a Hoboken, NJ, USA : |b Wiley, |c ©2007. | ||
| 300 | |a 1 online resource (xvii, 515 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 347 | |a data file |2 rda | ||
| 504 | |a Includes bibliographical references and index. | ||
| 505 | 0 | |a Fundamental Principles of Optical Lithography: The Science of Microfabrication; Contents; Preface; 1: Introduction to Semiconductor Lithography; 2: Aerial Image Formation -The Basics; 3: Aerial Image Formation -The Details; 4: Imaging in Resist: Standing Waves and Swing Curves; 5: Conventional Resists: Exposure and Bake Chemistry; 6: Chemically Amplified Resists: Exposure and Bake Chemistry; 7: Photoresist Development; 8: Lithographic Control in Semiconductor Manufacturing; 8: Lithographic Control in Semiconductor Manufacturing. | |
| 520 | |a The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formatio. | ||
| 588 | 0 | |a Print version record. | |
| 590 | |a ProQuest Ebook Central |b Ebook Central Academic Complete | ||
| 650 | 0 | |a Integrated circuits |x Design and construction. | |
| 650 | 0 | |a Microlithography |x Industrial applications. | |
| 650 | 6 | |a Circuits intégrés |x Conception et construction. | |
| 650 | 6 | |a Microlithographie |x Applications industrielles. | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Imaging Systems. |2 bisacsh | |
| 650 | 7 | |a Integrated circuits |x Design and construction |2 fast | |
| 650 | 7 | |a Microlithography |x Industrial applications |2 fast | |
| 758 | |i has work: |a Fundamental principles of optical lithography (Text) |1 https://id.oclc.org/worldcat/entity/E39PCFrBxBXqwgKcd4BwfMKgXd |4 https://id.oclc.org/worldcat/ontology/hasWork | ||
| 776 | 0 | 8 | |i Print version: |a Mack, Chris A. |t Fundamental principles of optical lithography. |d Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, ©2007 |w (DLC) 2007044548 |
| 856 | 4 | 0 | |u https://ebookcentral.uam.elogim.com/lib/uam-ebooks/detail.action?docID=470628 |z Texto completo |
| 938 | |a Askews and Holts Library Services |b ASKH |n AH3923870 | ||
| 938 | |a Baker and Taylor |b BTCP |n BK0007901269 | ||
| 938 | |a EBL - Ebook Library |b EBLB |n EBL470628 | ||
| 938 | |a ebrary |b EBRY |n ebr10300846 | ||
| 938 | |a EBSCOhost |b EBSC |n 449993 | ||
| 938 | |a ProQuest MyiLibrary Digital eBook Collection |b IDEB |n 234881 | ||
| 938 | |a YBP Library Services |b YANK |n 3043679 | ||
| 938 | |a YBP Library Services |b YANK |n 2941317 | ||
| 938 | |a YBP Library Services |b YANK |n 12678482 | ||
| 994 | |a 92 |b IZTAP | ||