Cargando…
Fundamental principles of optical lithography : the science of microfabrication /
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Chichester, West Sussex, England ; Hoboken, NJ, USA :
Wiley,
©2007.
|
| Temas: | |
| Acceso en línea: | Texto completo |
| Sumario: | The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formatio. |
|---|---|
| Descripción Física: | 1 online resource (xvii, 515 pages) : illustrations |
| Bibliografía: | Includes bibliographical references and index. |
| ISBN: | 9780470723869 0470723866 0470723874 9780470723876 1282348817 9781282348813 9786612348815 661234881X 1119965071 9781119965077 |