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Surfaces and Their Measurement.

The importance of surface metrology has long been acknowledged in manufacturing and mechanical engineering, but has now gained growing recognition in an expanding number of new applications in fields such as semiconductors, electronics and optics. Metrology is the scientific study of measurement, an...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Whitehouse, David J. (Autor)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: San Diego : Butterworth-Heinemann [Imprint] Elsevier Science & Technology Books. Jan. 2002
Temas:
Acceso en línea:Texto completo

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245 1 0 |a Surfaces and Their Measurement. 
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520 |a The importance of surface metrology has long been acknowledged in manufacturing and mechanical engineering, but has now gained growing recognition in an expanding number of new applications in fields such as semiconductors, electronics and optics. Metrology is the scientific study of measurement, and surface metrology is the study of the measurement of rough surfaces. In this book, Professor David Whitehouse, an internationally acknowledged subject expert, covers the wide range of theory and practice, including the use of new methods of instrumentation. Written by one of the worlds leading metrologists, this book covers electronics and optics applications as well as mechanical. It is written for mechanical and manufacturing engineers, tribologists and precision engineers in industry and academia. 
505 0 |a Front Cover; Surfaces and their Measurement; Copyright Page; Contents; Foreword; Chapter 1. Introduction; 1.1 General; 1.2 What is surface metrology?; 1.3 Usefulness of surfaces; 1.4 Nature of surfaces; Chapter 2. Identification and separation of surface features; 2.1 Visualization; 2.2 Profiles and roughness -- understanding the measurement routine; 2.3 Waviness; 2.4 Implementing the concept of sampling length; 2.5 The shape of the reference line; 2.6 Other methods; 2.7 Filtering and M system; 2.8 Conclusions; Chapter 3. Profile and areal (3D) parameter characterization; 3.1 Specification 
505 8 |a 3.2 Classification of parameters for the profile 3.3 Random process analysis; 3.4 Areal (3D) assessment; 3.5 Space frequency functions; 3.6 Comments on digital areal analysis; 3.7 Two-dimensional filtering (areal filtering); 3.8 Fractal surfaces; 3.9 Summary of characterization; Chapter 4. Surface metrology and manufacture; 4.1 Where and when to measure; 4.2 The process and surface finish; 4.3 Process control; 4.4 Relationship between surface metrology and manufacture; 4.5 Force and metrology loops; 4.6 Unit events and auto correlation; 4.7 Use of the power spectrum 
505 8 |a 4.8 Application of space frequency functions 4.9 Conclusions; Chapter 5. Function and surface texture; 5.1 Generic approach; 5.2 Some specific examples in tribology; 5.3 Surface models; 5.4 Summary of function; Chapter 6. Surface finish measurement -- general; 6.1 Some quick ways of examining the surface; 6.2 Surface finish instrumentation; 6.3 Comments; Chapter 7. Stylus instruments; 7.1 The stylus; 7.2 Reference; 7.3 Use of skids; 7.4 Pick-up systems; 7.5 Stylus damage; 7.6 Stylus instrument usage; Chapter 8. Optical methods; 8.1 Optical path length; 8.2 Optical penetration 
505 8 |a 8.3 Resolution and depth of focus 8.4 Comparison between optical and stylus methods; 8.5 Gloss meters; 8.6 Total integrating sphere; 8.7 Diffractometer; 8.8 Interferometry; 8.9 Optical followers; 8.10 Heterodyne method; 8.11 Other optical methods; 8.12 Conclusions from the comparison of tactile and optical methods; Chapter 9. Scanning microscopes; 9.1 General; 9.2 Scanning microscopes; 9.3 Operation of the STM; 9.4 The atomic force microscope; 9.5 Scanning microscopes: conclusions; 9.6 Instruments 'horns of metrology' : conclusions; Chapter 10. Errors of form (excluding axes of rotation) 
505 8 |a 10.1 General statement 10.2 Straightness and related topics; 10.3 Measurement; 10.4 Assessment and classification of straightness; 10.5 Flatness; 10.6 Conclusions; Chapter 11. Roundness and related subjects; 11.1 General; 11.2 Direction of measurement; 11.3 Display of roundness; 11.4 Lobing; 11.5 Methods of measuring roundness; 11.6 Nature of the roundness signal; 11.7 Assessment of roundness; 11.8 Partial arc determination; 11.9 Other parameters; 11.10 Filtering for roundness; 11.11 Harmonic problems; 11.12 Alternatives to harmonic analysis; 11.13 Non-roundness parameters; 11.14 Conclusions 
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