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Reliability of MEMS /
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Weinheim :
Wiley-VCH,
©2008.
|
| Colección: | Advanced micro & nanosystems ;
v. 6. |
| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Machine derived contents note: Preface.
- Foreword.
- List of Contributors.
- Overview.
- 1 Evaluation of Mechanical Properties of MEMS Materials and Their Standardization (Toshiyuki Tsuchiya).
- 2 Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating?Substrate Systems (Mototsugu Sakai)
- 3 Thin-fi lm Characterization Using the Bulge Test (Oliver Paul, Joao Gaspar).
- 4 Uniaxial Tensile Test for MEMS Materials (Takahiro Namazu).
- 5 On-chip Testing of MEMS (Harold Kahn).
- 6 Reliability of a Capacitive Pressure Sensor (Fumihiko Sato, Hideaki Watanabe, Sho Sasaki).
- 7 Inertial Sensors (Osamu Torayashiki, Kenji Komaki).
- 8 Inertial Sensors (Noriyuki Yasuik).
- 9 Reliability of MEMS Variable Optical Attenuator (Hiroshi Toshiyoshi, Keiji Isamoto, Changho Chong).
- 10 Eco Scan MEMS Resonant Mirror (Yuzuru Ueda, Akira Yamazaki).
- Index.