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|a Reliability of MEMS /
|c edited by Osamu Tabata and Toshiyuki Tsuchiya.
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| 260 |
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|a Weinheim :
|b Wiley-VCH,
|c ©2008.
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| 300 |
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|a 1 online resource (xx, 303 pages) :
|b illustrations
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| 336 |
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|a text
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1 |
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|a Advanced micro & nanosystems ;
|v v. 6
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| 500 |
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|a "Testing of materials and devices"--Cover.
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| 504 |
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|a Includes bibliographical references and index.
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| 588 |
0 |
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|a Print version record.
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| 505 |
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|a Machine derived contents note: Preface. -- Foreword. -- List of Contributors. -- Overview. -- 1 Evaluation of Mechanical Properties of MEMS Materials and Their Standardization (Toshiyuki Tsuchiya). -- 2 Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating?Substrate Systems (Mototsugu Sakai) -- 3 Thin-fi lm Characterization Using the Bulge Test (Oliver Paul, Joao Gaspar). -- 4 Uniaxial Tensile Test for MEMS Materials (Takahiro Namazu). -- 5 On-chip Testing of MEMS (Harold Kahn). -- 6 Reliability of a Capacitive Pressure Sensor (Fumihiko Sato, Hideaki Watanabe, Sho Sasaki). -- 7 Inertial Sensors (Osamu Torayashiki, Kenji Komaki). -- 8 Inertial Sensors (Noriyuki Yasuik). -- 9 Reliability of MEMS Variable Optical Attenuator (Hiroshi Toshiyoshi, Keiji Isamoto, Changho Chong). -- 10 Eco Scan MEMS Resonant Mirror (Yuzuru Ueda, Akira Yamazaki). -- Index.
|
| 590 |
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|a ProQuest Ebook Central
|b Ebook Central Academic Complete
|
| 650 |
|
0 |
|a Microelectromechanical systems
|x Reliability.
|
| 650 |
|
6 |
|a Microsystèmes électromécaniques
|x Fiabilité.
|
| 650 |
|
7 |
|a TECHNOLOGY & ENGINEERING
|x Mechanical.
|2 bisacsh
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| 700 |
1 |
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|a Tsuchiya, Toshiyuki.
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| 700 |
1 |
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|a Tabata, Osamu,
|d 1956-
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|i has work:
|a Reliability of MEMS (Text)
|1 https://id.oclc.org/worldcat/entity/E39PCFXxF6j7kkc489DY3HxfVP
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|i Print version:
|t Reliability of MEMS.
|d Weinheim : Wiley-VCH, ©2008
|z 9783527314942
|z 3527314946
|w (DLC) 2008459617
|w (OCoLC)188552319
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| 830 |
|
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|a Advanced micro & nanosystems ;
|v v. 6.
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