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Enabling technology for MEMS and nanodevices /

Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applicati...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Baltes, H. (Henry)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Weinheim [Germany] : Wiley-VCH, ©2004.
Colección:Advanced micro & nanosystems ; v. 1.
Temas:
Acceso en línea:Texto completo