Cargando…
Enabling technology for MEMS and nanodevices /
Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applicati...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Weinheim [Germany] :
Wiley-VCH,
©2004.
|
| Colección: | Advanced micro & nanosystems ;
v. 1. |
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
| LEADER | 00000cam a2200000 a 4500 | ||
|---|---|---|---|
| 001 | EBOOKCENTRAL_ocn214281565 | ||
| 003 | OCoLC | ||
| 005 | 20240329122006.0 | ||
| 006 | m o d | ||
| 007 | cr cn||||||||| | ||
| 008 | 080327s2004 gw a ob 001 0 eng d | ||
| 040 | |a DG1 |b eng |e pn |c DG1 |d OCLCG |d YDXCP |d N$T |d EBLCP |d OCLCE |d OCLCQ |d DG1 |d OCLCQ |d MERUC |d E7B |d OCLCO |d OCLCQ |d OCLCF |d OCLCA |d OCLCQ |d DEBSZ |d OCLCQ |d COO |d OCLCQ |d DEBBG |d DG1 |d LIP |d ZCU |d OCLCQ |d OCLCO |d OCLCQ |d ICG |d VT2 |d AU@ |d OCLCQ |d OCLCO |d OCLCA |d U3W |d OCLCQ |d DKC |d OCLCQ |d UX1 |d OCLCQ |d HS0 |d REDDC |d OCLCO |d OCLCQ |d OCLCO |d OCLCL | ||
| 019 | |a 289076489 |a 609202845 |a 645926994 |a 1055371797 |a 1058016112 |a 1081148962 |a 1081217821 |a 1101725121 |a 1144762539 |a 1148113645 |a 1175612716 |a 1240516863 |a 1257383987 |a 1261323017 |a 1294678677 | ||
| 020 | |a 9783527616701 | ||
| 020 | |a 3527616705 | ||
| 020 | |a 9783527616923 |q (electronic bk.) | ||
| 020 | |a 3527616926 |q (electronic bk.) | ||
| 020 | |z 352730746X |q (hd. bd.) | ||
| 020 | |z 9783527307463 |q (hd. bd.) | ||
| 024 | 7 | |a 10.1002/9783527616701 |2 doi | |
| 029 | 1 | |a AU@ |b 000043299891 | |
| 029 | 1 | |a CHNEW |b 000931383 | |
| 029 | 1 | |a CHVBK |b 480118442 | |
| 029 | 1 | |a DEBBG |b BV043387769 | |
| 029 | 1 | |a DEBBG |b BV044187653 | |
| 029 | 1 | |a DEBSZ |b 433534133 | |
| 029 | 1 | |a DEBSZ |b 449174115 | |
| 035 | |a (OCoLC)214281565 |z (OCoLC)289076489 |z (OCoLC)609202845 |z (OCoLC)645926994 |z (OCoLC)1055371797 |z (OCoLC)1058016112 |z (OCoLC)1081148962 |z (OCoLC)1081217821 |z (OCoLC)1101725121 |z (OCoLC)1144762539 |z (OCoLC)1148113645 |z (OCoLC)1175612716 |z (OCoLC)1240516863 |z (OCoLC)1257383987 |z (OCoLC)1261323017 |z (OCoLC)1294678677 | ||
| 037 | |a 10.1002/9783527616701 |b Wiley InterScience |n http://www3.interscience.wiley.com | ||
| 042 | |a dlr | ||
| 050 | 4 | |a TK7875 |b .E53 2004eb | |
| 072 | 7 | |a TA |2 lcco | |
| 072 | 7 | |a TEC |x 027000 |2 bisacsh | |
| 082 | 0 | 4 | |a 620.5 |2 22 |
| 084 | |a ZN 3700 |2 rvk | ||
| 084 | |a ZN 3750 |2 rvk | ||
| 084 | |a ZN 4980 |2 rvk | ||
| 084 | |a ELT 270f |2 stub | ||
| 084 | |a ELT 090f |2 stub | ||
| 049 | |a UAMI | ||
| 245 | 0 | 0 | |a Enabling technology for MEMS and nanodevices / |c edited by H. Baltes [and others]. |
| 260 | |a Weinheim [Germany] : |b Wiley-VCH, |c ©2004. | ||
| 300 | |a 1 online resource (xii, 427 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 1 | |a Advanced micro & nanosystems ; |v v. 1 | |
| 504 | |a Includes bibliographical references and index. | ||
| 588 | 0 | |a Print version record. | |
| 520 | |a Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces. | ||
| 506 | |3 Use copy |f Restrictions unspecified |2 star |5 MiAaHDL | ||
| 533 | |a Electronic reproduction. |b [Place of publication not identified] : |c HathiTrust Digital Library, |d 2010. |5 MiAaHDL | ||
| 538 | |a Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |u http://purl.oclc.org/DLF/benchrepro0212 |5 MiAaHDL | ||
| 583 | 1 | |a digitized |c 2010 |h HathiTrust Digital Library |l committed to preserve |2 pda |5 MiAaHDL | |
| 505 | 0 | |a Advanced Micro & Nanosystems Volume 1 Enabling Technology for MEMS and Nanodevices; Preface; Contents; List of Contributors; 1 M3: the Third Dimension of Silicon; 2 Trends in MEMS Commercialization; 3 Capacitive Interfaces for MEMS; 4 Packaging of Advanced Micro- and Nanosystems; 5 High-frequency Integrated Microelectromechanical Resonators and Filters; 6 MEMS in Mass Storage Systems; 7 Scanning Micro- and Nanoprobes for Electrochemical Imaging; 8 Nanofluidic Modeling and Simulation; 9 Nanofluidics -- Structures and Devices; 10 Carbon Nanotubes and Sensors: a Review | |
| 590 | |a ProQuest Ebook Central |b Ebook Central Academic Complete | ||
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 0 | |a Microelectronics. | |
| 650 | 0 | |a Nanotechnology. | |
| 650 | 6 | |a Microsystèmes électromécaniques. | |
| 650 | 6 | |a Microélectronique. | |
| 650 | 6 | |a Nanotechnologie. | |
| 650 | 7 | |a microelectronics. |2 aat | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Nanotechnology & MEMS. |2 bisacsh | |
| 650 | 7 | |a Microelectromechanical systems |2 fast | |
| 650 | 7 | |a Microelectronics |2 fast | |
| 650 | 7 | |a Nanotechnology |2 fast | |
| 650 | 7 | |a Mikromechanik |2 gnd | |
| 650 | 7 | |a Nanotechnologie |2 gnd | |
| 700 | 1 | |a Baltes, H. |q (Henry) |1 https://id.oclc.org/worldcat/entity/E39PCjCjtKJPVDYBvP979jtc8C | |
| 758 | |i has work: |a Enabling technology for MEMS and nanodevices (Text) |1 https://id.oclc.org/worldcat/entity/E39PCGHfM8dFkM87fwvHXKVvd3 |4 https://id.oclc.org/worldcat/ontology/hasWork | ||
| 776 | 0 | 8 | |i Print version: |t Enabling technology for MEMS and nanodevices. |d Weinheim [Germany] : Wiley-VCH, ©2004 |z 352730746X |z 9783527307463 |w (OCoLC)55807757 |
| 830 | 0 | |a Advanced micro & nanosystems ; |v v. 1. | |
| 856 | 4 | 0 | |u https://ebookcentral.uam.elogim.com/lib/uam-ebooks/detail.action?docID=481311 |z Texto completo |
| 938 | |a EBL - Ebook Library |b EBLB |n EBL481311 | ||
| 938 | |a ebrary |b EBRY |n ebr10577560 | ||
| 938 | |a EBSCOhost |b EBSC |n 246680 | ||
| 938 | |a YBP Library Services |b YANK |n 2944779 | ||
| 938 | |a YBP Library Services |b YANK |n 2924209 | ||
| 994 | |a 92 |b IZTAP | ||