Thin film materials : stress, defect formation, and surface evolution /

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"Thin films play an important role in many technological applications including microelectronic device, magnetic storage media and surface coatings. This book provides a comprehensive coverage of the major issues and topics dealing with stress, defect formation and surface evolution in thin fil...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Freund, L. B.
Otros Autores: Suresh, S. (Subra)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Cambridge, UK ; New York : Cambridge University Press, 2003.
Temas:
Thin films.
Surfaces (Technology)
Couches minces.
Surfaces (Technologie)
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Thin films
Dünne Schicht
Werkstoffkunde
Acceso en línea:Texto completo
Tabla de Contenidos:
  • 1. Introduction and Overview
  • 2. Film stress and substrate curvature
  • 3. Stress in anisotropic and patterned films
  • 4. Delamination and fracture
  • 5. Film buckling, bulging and peeling
  • 6. Dislocation formation in epitaxial systems
  • 7. Dislocation interactions and strain relaxation
  • 8. Equilibrium and stability of surfaces
  • 9. The role of stress in mass transport.

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