Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes

This book provides a comprehensive introduction to a recently-developed approach to the growth mechanism of thin films and nanostructures via chemical vapour deposition (CVD). Starting from the underlying principles of the low pressure synthesis of diamond films, it is shown that diamond growth occu...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Hwang, Nong Moon (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Dordrecht : Springer Netherlands : Imprint: Springer, 2016.
Edición:1st ed. 2016.
Colección:Springer Series in Surface Sciences, 60
Temas:
Surfaces (Physics).
Surfaces (Technology).
Thin films.
Nanoscience.
Semiconductors.
Nanotechnology.
Surface and Interface and Thin Film.
Surfaces, Interfaces and Thin Film.
Nanophysics.
Acceso en línea:Texto Completo
Tabla de Contenidos:
  • 1 Non-Classical Crystallization
  • 2 Thermodynamics of Physical and Chemical Vapour Deposition
  • 3 Nucleation
  • 4 Growth
  • 5 Diamond Synthesis at Low Pressure
  • 6 Growth Mechanism of CVD Diamond
  • 7 Growth Mechanism of CVD Silicon
  • 8 Other Works Related to Non-Classical Crystallization of Thin Films and Nanostructures
  • 9 Experimental Confirmation of Charged Nanoparticles during Atmospheric CVD Using Differential Mobility Analyser
  • 10 Experimental Confirmation of Charged Nanoparticles at Low Pressure
  • 11 Deposition Behavior of Charged Nanoparticles
  • 12 Bias Effect on Deposition Behaviour of Charged Nanoparticles
  • 13 Charge-Enhanced Kinetics
  • 14 Implications and Applications. .

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