Historical Evolution Toward Achieving Ultrahigh Vacuum in JEOL Electron Microscopes

This book describes the developmental history of the vacuum system of the transmission electron microscope (TEM) at the Japan Electron Optics Laboratory (JEOL) from its inception to its use in today's high-technology microscopes. The author and his colleagues were engaged in developing vacuum t...

Descripción completa

Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Yoshimura, Nagamitsu (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Tokyo : Springer Japan : Imprint: Springer, 2014.
Edición:1st ed. 2014.
Colección:SpringerBriefs in Applied Sciences and Technology,
Temas:
Spectrum analysis.
Microtechnology.
Microelectromechanical systems.
Machinery.
Measurement.
Measuring instruments.
Spectroscopy.
Microsystems and MEMS.
Machinery and Machine Elements.
Measurement Science and Instrumentation.
Acceso en línea:Texto Completo
Tabla de Contenidos:
  • Introduction of the electron microscope
  • History of JEOL electron microscopes
  • Accidents and information, instructing us to improve the vacuum systems of JEMs
  • Development of the evacuation systems for JEMs
  • Development of JEOL SIPs
  • Ultrahigh vacuum electron microscopes.

Ejemplares similares