Micro and Nano Fabrication Tools and Processes /

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Gatzen, Hans H. (Autor), Saile, Volker (Autor), Leuthold, Jürg (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2015.
Edición:1st ed. 2015.
Temas:
Microtechnology.
Microelectromechanical systems.
Manufactures.
Microsystems and MEMS.
Machines, Tools, Processes.
Acceso en línea:Texto Completo
Tabla de Contenidos:
  • Introduction-MEMS, a Historical Perspective
  • Vacuum Technology
  • Deposition Technologies
  • Etching Technologies
  • Doping and Surface Modification
  • Lithography
  • LIGA
  • Nanofabrication by Self-Assembly
  • Enabling Technologies I - Wafer Planarization and Bonding
  • Enabling Technologies II - Contamination Control
  • Device Fabrication - An Example.

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