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Micro and Nano Fabrication Tools and Processes /
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes...
| Clasificación: | Libro Electrónico |
|---|---|
| Autores principales: | , , |
| Autor Corporativo: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2015.
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| Edición: | 1st ed. 2015. |
| Temas: | |
| Acceso en línea: | Texto Completo |
MARC
| LEADER | 00000nam a22000005i 4500 | ||
|---|---|---|---|
| 001 | 978-3-662-44395-8 | ||
| 003 | DE-He213 | ||
| 005 | 20220114121043.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 150102s2015 gw | s |||| 0|eng d | ||
| 020 | |a 9783662443958 |9 978-3-662-44395-8 | ||
| 024 | 7 | |a 10.1007/978-3-662-44395-8 |2 doi | |
| 050 | 4 | |a TK7875 | |
| 072 | 7 | |a TJF |2 bicssc | |
| 072 | 7 | |a TEC027000 |2 bisacsh | |
| 072 | 7 | |a TJF |2 thema | |
| 082 | 0 | 4 | |a 621.381 |2 23 |
| 100 | 1 | |a Gatzen, Hans H. |e author. |4 aut |4 http://id.loc.gov/vocabulary/relators/aut | |
| 245 | 1 | 0 | |a Micro and Nano Fabrication |h [electronic resource] : |b Tools and Processes / |c by Hans H. Gatzen, Volker Saile, Jürg Leuthold. |
| 250 | |a 1st ed. 2015. | ||
| 264 | 1 | |a Berlin, Heidelberg : |b Springer Berlin Heidelberg : |b Imprint: Springer, |c 2015. | |
| 300 | |a XXVI, 519 p. 357 illus., 54 illus. in color. |b online resource. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 347 | |a text file |b PDF |2 rda | ||
| 505 | 0 | |a Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example. | |
| 520 | |a For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control. | ||
| 650 | 0 | |a Microtechnology. | |
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 0 | |a Manufactures. | |
| 650 | 1 | 4 | |a Microsystems and MEMS. |
| 650 | 2 | 4 | |a Machines, Tools, Processes. |
| 700 | 1 | |a Saile, Volker. |e author. |4 aut |4 http://id.loc.gov/vocabulary/relators/aut | |
| 700 | 1 | |a Leuthold, Jürg. |e author. |4 aut |4 http://id.loc.gov/vocabulary/relators/aut | |
| 710 | 2 | |a SpringerLink (Online service) | |
| 773 | 0 | |t Springer Nature eBook | |
| 776 | 0 | 8 | |i Printed edition: |z 9783662443965 |
| 776 | 0 | 8 | |i Printed edition: |z 9783662443941 |
| 776 | 0 | 8 | |i Printed edition: |z 9783662508268 |
| 856 | 4 | 0 | |u https://doi.uam.elogim.com/10.1007/978-3-662-44395-8 |z Texto Completo |
| 912 | |a ZDB-2-ENG | ||
| 912 | |a ZDB-2-SXE | ||
| 950 | |a Engineering (SpringerNature-11647) | ||
| 950 | |a Engineering (R0) (SpringerNature-43712) | ||