Micro and Nano Fabrication Tools and Processes /

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Gatzen, Hans H. (Autor), Saile, Volker (Autor), Leuthold, Jürg (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2015.
Edición:1st ed. 2015.
Temas:
Microtechnology.
Microelectromechanical systems.
Manufactures.
Microsystems and MEMS.
Machines, Tools, Processes.
Acceso en línea:Texto Completo
Descripción
Sumario:For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Descripción Física:XXVI, 519 p. 357 illus., 54 illus. in color. online resource.
ISBN:9783662443958

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