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|a 9783642403873
|9 978-3-642-40387-3
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|a 10.1007/978-3-642-40387-3
|2 doi
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|a T174.7
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|a 620.5
|2 23
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|a Liu, Qian.
|e author.
|4 aut
|4 http://id.loc.gov/vocabulary/relators/aut
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|a Novel Optical Technologies for Nanofabrication
|h [electronic resource] /
|c by Qian Liu, Xuanming Duan, Changsi Peng.
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|a 1st ed. 2014.
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|a Berlin, Heidelberg :
|b Springer Berlin Heidelberg :
|b Imprint: Springer,
|c 2014.
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|a IX, 267 p. 232 illus., 162 illus. in color.
|b online resource.
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|a text
|b txt
|2 rdacontent
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|a computer
|b c
|2 rdamedia
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|a online resource
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|a text file
|b PDF
|2 rda
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|a Nanostructure Science and Technology,
|x 2197-7976
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|a Introduction -- Super-resolution Laser Direct Writing and Its Applications -- Laser path-guided wrinkle structures -- Laser Micro/Nanofabrication and Applications Based on Multiphoton Process -- Laser Interference Nano-Fabrication -- Super-Resolution Patterning and Photolithography Based on Surface Plasmon Polaritons -- Mass production of large-format micro/nano-structure based optical devices.
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|a Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors' groups. It focuses on new techniques and methods as well as applications and development trends in laser nanofabrication, including super-resolution laser direct writing, surface structures composed of laser path-guided wrinkle, three-dimensional laser nanofabrication based on two-photon absorption, and nanofabrication by laser interference and surface plasmon polaritons. This book serves as a reference for academic researchers, engineers, technical professionals and graduate students in the fields of micro/nanotechnology, thin film materials, super-resolution optics and laser techniques. Qian Liu is a Professor at Laboratory for Nanodevice, National Center for Nanoscience and Technology, China. Xuanming Duan is a Professor at the Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, China Changsi Peng is a Professor at the Institute of Information Optical Engineering, Soochow University, China.
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|a Nanotechnology.
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|a Microtechnology.
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|a Microelectromechanical systems.
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|a Lasers.
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|a Optical materials.
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|a Nanoscience.
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|a Nanotechnology.
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|a Microsystems and MEMS.
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|a Laser.
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|a Optical Materials.
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|a Nanophysics.
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|a Duan, Xuanming.
|e author.
|4 aut
|4 http://id.loc.gov/vocabulary/relators/aut
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|a Peng, Changsi.
|e author.
|4 aut
|4 http://id.loc.gov/vocabulary/relators/aut
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|a SpringerLink (Online service)
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|t Springer Nature eBook
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|i Printed edition:
|z 9783642403880
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|i Printed edition:
|z 9783642403866
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|i Printed edition:
|z 9783662521861
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|a Nanostructure Science and Technology,
|x 2197-7976
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|u https://doi.uam.elogim.com/10.1007/978-3-642-40387-3
|z Texto Completo
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|a ZDB-2-CMS
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|a ZDB-2-SXC
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|a Chemistry and Materials Science (SpringerNature-11644)
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|a Chemistry and Material Science (R0) (SpringerNature-43709)
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