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Nanoimprint Lithography: An Enabling Process for Nanofabrication
Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It pro...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Autor Corporativo: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2013.
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| Edición: | 1st ed. 2013. |
| Temas: | |
| Acceso en línea: | Texto Completo |
Tabla de Contenidos:
- Principles and statues of nanoimprint lithography
- Stamp Fabrication
- stamp surface treatment
- Nanoimprint lithography resists
- Nanoimprint lithography process
- Modeling and Simulation of NIL
- Application of NIL in Light emitting Diodes
- Application of NIL in memory devices
- Application of NIL in solar cell.