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Introduction to Microsystem Design
The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Autor Corporativo: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2011.
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| Edición: | 1st ed. 2011. |
| Colección: | RWTHedition,
1 |
| Temas: | |
| Acceso en línea: | Texto Completo |
MARC
| LEADER | 00000nam a22000005i 4500 | ||
|---|---|---|---|
| 001 | 978-3-642-19489-4 | ||
| 003 | DE-He213 | ||
| 005 | 20220117181052.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 110530s2011 gw | s |||| 0|eng d | ||
| 020 | |a 9783642194894 |9 978-3-642-19489-4 | ||
| 024 | 7 | |a 10.1007/978-3-642-19489-4 |2 doi | |
| 050 | 4 | |a TK7875 | |
| 072 | 7 | |a TJF |2 bicssc | |
| 072 | 7 | |a TEC027000 |2 bisacsh | |
| 072 | 7 | |a TJF |2 thema | |
| 082 | 0 | 4 | |a 621.381 |2 23 |
| 100 | 1 | |a Schomburg, Werner Karl. |e author. |4 aut |4 http://id.loc.gov/vocabulary/relators/aut | |
| 245 | 1 | 0 | |a Introduction to Microsystem Design |h [electronic resource] / |c by Werner Karl Schomburg. |
| 250 | |a 1st ed. 2011. | ||
| 264 | 1 | |a Berlin, Heidelberg : |b Springer Berlin Heidelberg : |b Imprint: Springer, |c 2011. | |
| 300 | |a XXII, 322 p. |b online resource. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 347 | |a text file |b PDF |2 rda | ||
| 490 | 1 | |a RWTHedition, |x 1865-0902 ; |v 1 | |
| 505 | 0 | |a Preface -- Notations and symbols -- Introduction -- Scaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies between physical domains -- Mechanical devices for electronics -- Pressure sensors -- Flow sensors -- Inertial sensors. | |
| 520 | |a The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book. | ||
| 650 | 0 | |a Microtechnology. | |
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 0 | |a Optical materials. | |
| 650 | 0 | |a Physics. | |
| 650 | 0 | |a Electronic circuits. | |
| 650 | 1 | 4 | |a Microsystems and MEMS. |
| 650 | 2 | 4 | |a Optical Materials. |
| 650 | 2 | 4 | |a Applied and Technical Physics. |
| 650 | 2 | 4 | |a Electronic Circuits and Systems. |
| 710 | 2 | |a SpringerLink (Online service) | |
| 773 | 0 | |t Springer Nature eBook | |
| 776 | 0 | 8 | |i Printed edition: |z 9783642268526 |
| 776 | 0 | 8 | |i Printed edition: |z 9783642194887 |
| 776 | 0 | 8 | |i Printed edition: |z 9783642194900 |
| 830 | 0 | |a RWTHedition, |x 1865-0902 ; |v 1 | |
| 856 | 4 | 0 | |u https://doi.uam.elogim.com/10.1007/978-3-642-19489-4 |z Texto Completo |
| 912 | |a ZDB-2-ENG | ||
| 912 | |a ZDB-2-SXE | ||
| 950 | |a Engineering (SpringerNature-11647) | ||
| 950 | |a Engineering (R0) (SpringerNature-43712) | ||