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00000nam a22000005i 4500 |
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978-3-642-15868-1 |
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DE-He213 |
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20220118181432.0 |
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110302s2011 gw | s |||| 0|eng d |
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|a 9783642158681
|9 978-3-642-15868-1
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|a 10.1007/978-3-642-15868-1
|2 doi
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|a 621.381
|2 23
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|a Semiconductor-On-Insulator Materials for Nanoelectronics Applications
|h [electronic resource] /
|c edited by Alexei Nazarov, J.-P. Colinge, Francis Balestra, Jean-Pierre Raskin, Francisco Gamiz, V.S. Lysenko.
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|a 1st ed. 2011.
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264 |
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|a Berlin, Heidelberg :
|b Springer Berlin Heidelberg :
|b Imprint: Springer,
|c 2011.
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300 |
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|a IX, 447 p.
|b online resource.
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|a text
|b txt
|2 rdacontent
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|a computer
|b c
|2 rdamedia
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|a online resource
|b cr
|2 rdacarrier
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|a text file
|b PDF
|2 rda
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|a Engineering Materials,
|x 1868-1212
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|a New semiconductor-on-insulator materials -- Physics of modern SemOI devices -- Diagnostics of the SOI devices -- Sensors and MEMS on SOI.
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|a "Semiconductor-On-Insulator Materials for NanoElectonics Applications" is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. The book contains the achievements in this field from leading companies and universities in Europe, USA, Brazil and Russia. It is articulated around four main topics: 1. New semiconductor-on-insulator materials; 2. Physics of modern SemOI devices; 3. Advanced characterization of SemOI devices; 4. Sensors and MEMS on SOI. "Semiconductor-On-Insulator Materials for NanoElectonics Applications" is useful not only to specialists in nano- and microelectronics but also to students and to the wider audience of readers who are interested in new directions in modern electronics and optoelectronics.
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|a Microtechnology.
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650 |
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|a Microelectromechanical systems.
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650 |
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|a Nanotechnology.
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650 |
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|a Semiconductors.
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650 |
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|a Materials-Analysis.
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650 |
1 |
4 |
|a Microsystems and MEMS.
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650 |
2 |
4 |
|a Nanotechnology.
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650 |
2 |
4 |
|a Semiconductors.
|
650 |
2 |
4 |
|a Characterization and Analytical Technique.
|
700 |
1 |
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|a Nazarov, Alexei.
|e editor.
|4 edt
|4 http://id.loc.gov/vocabulary/relators/edt
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700 |
1 |
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|a Colinge, J.-P.
|e editor.
|4 edt
|4 http://id.loc.gov/vocabulary/relators/edt
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700 |
1 |
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|a Balestra, Francis.
|e editor.
|4 edt
|4 http://id.loc.gov/vocabulary/relators/edt
|
700 |
1 |
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|a Raskin, Jean-Pierre.
|e editor.
|4 edt
|4 http://id.loc.gov/vocabulary/relators/edt
|
700 |
1 |
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|a Gamiz, Francisco.
|e editor.
|4 edt
|4 http://id.loc.gov/vocabulary/relators/edt
|
700 |
1 |
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|a Lysenko, V.S.
|e editor.
|4 edt
|4 http://id.loc.gov/vocabulary/relators/edt
|
710 |
2 |
|
|a SpringerLink (Online service)
|
773 |
0 |
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|t Springer Nature eBook
|
776 |
0 |
8 |
|i Printed edition:
|z 9783642267086
|
776 |
0 |
8 |
|i Printed edition:
|z 9783642158674
|
776 |
0 |
8 |
|i Printed edition:
|z 9783642158698
|
830 |
|
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|a Engineering Materials,
|x 1868-1212
|
856 |
4 |
0 |
|u https://doi.uam.elogim.com/10.1007/978-3-642-15868-1
|z Texto Completo
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912 |
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|a ZDB-2-CMS
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912 |
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|a ZDB-2-SXC
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950 |
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|a Chemistry and Materials Science (SpringerNature-11644)
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950 |
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|a Chemistry and Material Science (R0) (SpringerNature-43709)
|