Design and Manufacturing of Active Microsystems

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor Corporativo: SpringerLink (Online service)
Otros Autores: Büttgenbach, Stephanus (Editor ), Burisch, Arne (Editor ), Hesselbach, Jürgen (Editor )
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2011.
Edición:1st ed. 2011.
Colección:Microtechnology and MEMS,
Temas:
Microtechnology.
Microelectromechanical systems.
Mechatronics.
Manufactures.
Nanotechnology.
Microsystems and MEMS.
Machines, Tools, Processes.
Acceso en línea:Texto Completo

MARC

LEADER 00000nam a22000005i 4500
001 978-3-642-12903-2
003 DE-He213
005 20220119195656.0
007 cr nn 008mamaa
008 110304s2011 gw | s |||| 0|eng d
020 |a 9783642129032  |9 978-3-642-12903-2 
024 7 |a 10.1007/978-3-642-12903-2  |2 doi 
050 4 |a TK7875 
072 7 |a TJF  |2 bicssc 
072 7 |a TEC027000  |2 bisacsh 
072 7 |a TJF  |2 thema 
082 0 4 |a 621.381  |2 23 
245 1 0 |a Design and Manufacturing of Active Microsystems  |h [electronic resource] /  |c edited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach. 
250 |a 1st ed. 2011. 
264 1 |a Berlin, Heidelberg :  |b Springer Berlin Heidelberg :  |b Imprint: Springer,  |c 2011. 
300 |a XII, 444 p.  |b online resource. 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
347 |a text file  |b PDF  |2 rda 
490 1 |a Microtechnology and MEMS,  |x 2365-0680 
505 0 |a 1. Introduction -- 2. Design and Construction -- 3. Guiding and Measuring in Active Microsystems -- 4. Manufacturing and Fabrication -- 5. Microassembly -- 6.Industrial Applications. 
520 |a This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems. 
650 0 |a Microtechnology. 
650 0 |a Microelectromechanical systems. 
650 0 |a Mechatronics. 
650 0 |a Manufactures. 
650 0 |a Nanotechnology. 
650 1 4 |a Microsystems and MEMS. 
650 2 4 |a Mechatronics. 
650 2 4 |a Machines, Tools, Processes. 
650 2 4 |a Nanotechnology. 
700 1 |a Büttgenbach, Stephanus.  |e editor.  |4 edt  |4 http://id.loc.gov/vocabulary/relators/edt 
700 1 |a Burisch, Arne.  |e editor.  |4 edt  |4 http://id.loc.gov/vocabulary/relators/edt 
700 1 |a Hesselbach, Jürgen.  |e editor.  |4 edt  |4 http://id.loc.gov/vocabulary/relators/edt 
710 2 |a SpringerLink (Online service) 
773 0 |t Springer Nature eBook 
776 0 8 |i Printed edition:  |z 9783642129025 
776 0 8 |i Printed edition:  |z 9783642267383 
776 0 8 |i Printed edition:  |z 9783642129049 
830 0 |a Microtechnology and MEMS,  |x 2365-0680 
856 4 0 |u https://doi.uam.elogim.com/10.1007/978-3-642-12903-2  |z Texto Completo 
912 |a ZDB-2-CMS 
912 |a ZDB-2-SXC 
950 |a Chemistry and Materials Science (SpringerNature-11644) 
950 |a Chemistry and Material Science (R0) (SpringerNature-43709) 

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