Low Pressure Plasmas and Microstructuring Technology

This monograph presents an up to date perspective of gas discharge physics and its applications to various industries. It starts from a comprehensive overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electr...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Franz, Gerhard (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2009.
Edición:1st ed. 2009.
Temas:
Optical materials.
Electronics.
Surfaces (Technology).
Thin films.
Atomic structure  .
Molecular structure .
Optical Materials.
Electronics and Microelectronics, Instrumentation.
Surfaces, Interfaces and Thin Film.
Atomic and Molecular Structure and Properties.
Acceso en línea:Texto Completo
Tabla de Contenidos:
  • Collisions and cross sections
  • The plasma
  • DC discharges
  • High-frequency discharges I
  • High-frequency discharges II
  • High-frequency discharges III
  • Ion beam systems
  • Plasma diagnostics
  • Plasma deposition processes
  • Plasma etch processes
  • Etch Mechanisms
  • Outlook
  • Advanced Topics.

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