Low Pressure Plasmas and Microstructuring Technology
This monograph presents an up to date perspective of gas discharge physics and its applications to various industries. It starts from a comprehensive overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electr...
Clasificación: | Libro Electrónico |
---|---|
Autor principal: | Franz, Gerhard (Autor) |
Autor Corporativo: | SpringerLink (Online service) |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2009.
|
Edición: | 1st ed. 2009. |
Temas: | |
Acceso en línea: | Texto Completo |
Ejemplares similares
-
Hard X-ray Photoelectron Spectroscopy (HAXPES)
Publicado: (2016) -
Angle and Spin Resolved Auger Emission Theory and Applications to Atoms and Molecules /
por: Lohmann, Bernd
Publicado: (2009) -
Very High Resolution Photoelectron Spectroscopy
Publicado: (2007) -
Springer Handbook of Electronic and Photonic Materials
Publicado: (2007) -
Scanning Probe Microscopy Atomic Scale Engineering by Forces and Currents /
por: Foster, Adam, et al.
Publicado: (2006)