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Advanced Gate Stacks for High-Mobility Semiconductors

Will nanoelectronic devices continue to scale according to Moore's law? At this moment, there is no easy answer since gate scaling is rapidly emerging as a serious roadblock for the evolution of CMOS technology. Channel engineering based on high-mobility semiconductor materials (e.g. strained S...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor Corporativo: SpringerLink (Online service)
Otros Autores: Dimoulas, Athanasios (Editor ), Gusev, Evgeni (Editor ), McIntyre, Paul C. (Editor ), Heyns, Marc (Editor )
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2007.
Edición:1st ed. 2007.
Colección:Springer Series in Advanced Microelectronics, 27
Temas:
Acceso en línea:Texto Completo
Tabla de Contenidos:
  • Strained-Si CMOS Technology
  • High Current Drivability MOSFET Fabricated on Si(110) Surface
  • Advanced High-Mobility Semiconductor-on-Insulator Materials
  • Passivation and Characterization of Germanium Surfaces
  • Interface Engineering for High-? Ge MOSFETs
  • Effect of Surface Nitridation on the Electrical Characteristics of Germanium High-?/Metal Gate Metal-Oxide-Semiconductor Devices
  • Modeling of Growth of High-? Oxides on Semiconductors
  • Physical, Chemical, and Electrical Characterization of High-? Dielectrics on Ge and GaAs
  • Point Defects in Stacks of High-? Metal Oxides on Ge: Contrast with the Si Case
  • High ? Gate Dielectrics for Compound Semiconductors
  • Interface Properties of High-? Dielectrics on Germanium
  • A Theoretical View on the Dielectric Properties of Crystalline and Amorphous High-? Materials and Films
  • Germanium Nanodevices and Technology
  • Opportunities and Challenges of Germanium Channel MOSFETs
  • Germanium Deep-Submicron p-FET and n-FET Devices, Fabricated on Germanium-On-Insulator Substrates
  • Processing and Characterization of III-V Compound Semiconductor MOSFETs Using Atomic Layer Deposited Gate Dielectrics
  • Fabrication of MBE High-? MOSFETs in a Standard CMOS Flow.