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CMOS Hotplate Chemical Microsensors
This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microf...
| Clasificación: | Libro Electrónico |
|---|---|
| Autores principales: | , , , |
| Autor Corporativo: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2007.
|
| Edición: | 1st ed. 2007. |
| Colección: | Microtechnology and MEMS,
|
| Temas: | |
| Acceso en línea: | Texto Completo |
MARC
| LEADER | 00000nam a22000005i 4500 | ||
|---|---|---|---|
| 001 | 978-3-540-69562-2 | ||
| 003 | DE-He213 | ||
| 005 | 20220115044605.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 100301s2007 gw | s |||| 0|eng d | ||
| 020 | |a 9783540695622 |9 978-3-540-69562-2 | ||
| 024 | 7 | |a 10.1007/978-3-540-69562-2 |2 doi | |
| 050 | 4 | |a T1-995 | |
| 072 | 7 | |a TBC |2 bicssc | |
| 072 | 7 | |a TEC000000 |2 bisacsh | |
| 072 | 7 | |a TBC |2 thema | |
| 082 | 0 | 4 | |a 620 |2 23 |
| 100 | 1 | |a Graf, Markus. |e author. |4 aut |4 http://id.loc.gov/vocabulary/relators/aut | |
| 245 | 1 | 0 | |a CMOS Hotplate Chemical Microsensors |h [electronic resource] / |c by Markus Graf, Diego Barrettino, Henry P. Baltes, Andreas Hierlemann. |
| 250 | |a 1st ed. 2007. | ||
| 264 | 1 | |a Berlin, Heidelberg : |b Springer Berlin Heidelberg : |b Imprint: Springer, |c 2007. | |
| 300 | |a XII, 125 p. |b online resource. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 347 | |a text file |b PDF |2 rda | ||
| 490 | 1 | |a Microtechnology and MEMS, |x 2365-0680 | |
| 505 | 0 | |a Miniaturized Metal-Oxide Sensors -- Thermal Modelling of CMOS Microhotplates -- Microhotplates in CMOS Technology -- Monolithic Gas Sensor Systems -- Microsensor Arrays -- Conclusion and Outlook. | |
| 520 | |a This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microfabrication, packaging, and testing. A variety of different hotplates for different operation conditions is detailed and a family of metal-oxide-covered microhotplate-based microsensor systems with increasing complexity is presented. These systems belong to a new generation of chemical microsensors and represent examples of the successful integration of nanomaterials, microtechnology and microelectronics. The book provides students, scientists and engineers with an accessible introduction to the field of microhotplate-based chemical sensing, with all the necessary fundamental knowledge included. Beyond that, it also provides detailed information on all important issues concerning complex high-performance CMOS chemical microsensor systems; hence it will also be valuable to experts already familiar with the field. | ||
| 650 | 0 | |a Engineering. | |
| 650 | 0 | |a Physical chemistry. | |
| 650 | 0 | |a Optical materials. | |
| 650 | 1 | 4 | |a Technology and Engineering. |
| 650 | 2 | 4 | |a Physical Chemistry. |
| 650 | 2 | 4 | |a Optical Materials. |
| 700 | 1 | |a Barrettino, Diego. |e author. |4 aut |4 http://id.loc.gov/vocabulary/relators/aut | |
| 700 | 1 | |a Baltes, Henry P. |e author. |4 aut |4 http://id.loc.gov/vocabulary/relators/aut | |
| 700 | 1 | |a Hierlemann, Andreas. |e author. |4 aut |4 http://id.loc.gov/vocabulary/relators/aut | |
| 710 | 2 | |a SpringerLink (Online service) | |
| 773 | 0 | |t Springer Nature eBook | |
| 776 | 0 | 8 | |i Printed edition: |z 9783642089107 |
| 776 | 0 | 8 | |i Printed edition: |z 9783540834748 |
| 776 | 0 | 8 | |i Printed edition: |z 9783540695615 |
| 830 | 0 | |a Microtechnology and MEMS, |x 2365-0680 | |
| 856 | 4 | 0 | |u https://doi.uam.elogim.com/10.1007/978-3-540-69562-2 |z Texto Completo |
| 912 | |a ZDB-2-ENG | ||
| 912 | |a ZDB-2-SXE | ||
| 950 | |a Engineering (SpringerNature-11647) | ||
| 950 | |a Engineering (R0) (SpringerNature-43712) | ||