Sputtering by Particle Bombardment Experiments and Computer Calculations from Threshold to MeV Energies /

This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and...

Descripción completa

Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor Corporativo: SpringerLink (Online service)
Otros Autores: Behrisch, Rainer (Editor ), Eckstein, Wolfgang (Editor )
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2007.
Edición:1st ed. 2007.
Colección:Topics in Applied Physics, 110
Temas:
Surfaces (Technology).
Thin films.
Atoms.
Molecules.
Plasma (Ionized gases).
Surfaces, Interfaces and Thin Film.
Atoms and molecules in external fields.
Plasma Physics.
Acceso en línea:Texto Completo
Tabla de Contenidos:
  • and Overview
  • Computer Simulation of the Sputtering Process
  • Sputtering Yields
  • Results of Molecular Dynamics Calculations
  • Energy and Angular Distributions of Sputtered Species
  • Chemical Sputtering
  • Electronic Sputtering with Swift Heavy Ions.

Ejemplares similares