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Rare Earth Oxide Thin Films Growth, Characterization, and Applications /
Thin rare earth (RE) oxide films are emerging materials for microelectronic, nanoelectronic, and spintronic applications. The state-of-the-art of thin film deposition techniques as well as the structural, physical, chemical, and electrical properties of thin RE oxide films and of their interface wit...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor Corporativo: | |
| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2007.
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| Edición: | 1st ed. 2007. |
| Colección: | Topics in Applied Physics,
106 |
| Temas: | |
| Acceso en línea: | Texto Completo |
Tabla de Contenidos:
- Introduction
- ALD, MOCVD, and MBE deposition of rare earth oxides. - Requirements of precursor for MOCVD and ALD of rare earth oxides
- Models for ALD and MOCVD growth of rare earth oxides
- Growth of oxides with complex stoichiometry by ALD, e.g. La1-xCaxMnO3
- Fabrication and characterization of rare earth scandate thin films prepared by pulsed laser deposition
- Film and interface layer composition of rare earth (Lu, Yb) oxides deposited by ALD
- Local atomic environment of high-k oxides on silicon probed by X-ray absorption spectroscopy, and advanced transmission electron microscopy techniques (TEM-EELS)
- Strain-relief at internal dielectric interfaces in high-k gate stacks with transition metal and rare earth atom oxide dielectrics
- Electrical characterization of rare earth oxides grown by ALD
- Dielectric properties of rare-earth oxides: general trends from theory
- Charge traps in high-k dielectrics: ab initio study of defects in Pr-based materials
- Experimental determination of the band offset of rare earth oxides on various semiconductors
- Band edge electronic structure, and band offsets of transition metal/rare earth oxide dielectrics
- Rare earth oxides in microelectronics
- Requirements of oxides as gate dielectrics for CMOS devices, and ultimate scaling
- The magneto-electric properties of RMnO compounds
- Sesquioxides as host materials for rare-earth-doped bulk lasers and active waveguides.