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Gettering Defects in Semiconductors
Gettering Defects in Semiconductors fulfills three basic purposes: - to systematize the experience and research in exploiting various gettering techniques in microelectronics and nanoelectronics; - to identify new directions in research, particularly to enhance the perspective of professionals and y...
| Clasificación: | Libro Electrónico |
|---|---|
| Autores principales: | , |
| Autor Corporativo: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2005.
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| Edición: | 1st ed. 2005. |
| Colección: | Springer Series in Advanced Microelectronics,
19 |
| Temas: | |
| Acceso en línea: | Texto Completo |
Tabla de Contenidos:
- Basic technological processes and defect formation in the components of device structures
- Effects of defects on electrophysical and functional parameters in semiconducting structures and devices
- Techniques for high-temperature gettering
- Physical foundations for low-temperature gettering techniques.