CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms /

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspe...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Li, Flora (Autor), Nathan, Arokia (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2005.
Edición:1st ed. 2005.
Colección:Microtechnology and MEMS,
Temas:
Optical materials.
Lasers.
Engineering.
Electronics.
Optical Materials.
Laser.
Technology and Engineering.
Electronics and Microelectronics, Instrumentation.
Acceso en línea:Texto Completo
Tabla de Contenidos:
  • Overview of CCD
  • CCD Imaging in the Ultraviolet (UV) Regime
  • Silicon
  • Silicon Dioxide
  • Si-SiO2 Interface
  • General Effects of Radiation
  • Effects of Radiation on CCDs
  • UV-Induced Effects in Si
  • UV Laser Induced Effects in SiO2
  • UV Laser Induced Effects at the Si-SiO2 Interface
  • CCD Measurements at 157nm
  • Design Optimizations for Future Research
  • Concluding Remarks.

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