Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures /

This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Frühauf, Joachim (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2005.
Edición:1st ed. 2005.
Temas:
Optical materials.
Electronics.
Ceramic materials.
Telecommunication.
Chemistry, Technical.
Optical Materials.
Electronics and Microelectronics, Instrumentation.
Ceramics.
Microwaves, RF Engineering and Optical Communications.
Industrial Chemistry.
Acceso en línea:Texto Completo
Tabla de Contenidos:
  • Technological Basis of Bulk-Silicon-Microtechnique
  • Orientation Dependent Etching of Silicon
  • General Overview of the Shape- and Functional Elements and the Procedure of their Design
  • Simple Shape Elements
  • Elements for Mechanical Applications
  • Elements for Fluidic Applications
  • Elements for Optical Applications.

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