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Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures /
This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Autor Corporativo: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2005.
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| Edición: | 1st ed. 2005. |
| Temas: | |
| Acceso en línea: | Texto Completo |
MARC
| LEADER | 00000nam a22000005i 4500 | ||
|---|---|---|---|
| 001 | 978-3-540-26876-5 | ||
| 003 | DE-He213 | ||
| 005 | 20220117045516.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 100301s2005 gw | s |||| 0|eng d | ||
| 020 | |a 9783540268765 |9 978-3-540-26876-5 | ||
| 024 | 7 | |a 10.1007/b138230 |2 doi | |
| 050 | 4 | |a QC374-379 | |
| 072 | 7 | |a TJFD |2 bicssc | |
| 072 | 7 | |a TEC021020 |2 bisacsh | |
| 072 | 7 | |a TGMM |2 thema | |
| 082 | 0 | 4 | |a 620.11295 |2 23 |
| 100 | 1 | |a Frühauf, Joachim. |e author. |4 aut |4 http://id.loc.gov/vocabulary/relators/aut | |
| 245 | 1 | 0 | |a Shape and Functional Elements of the Bulk Silicon Microtechnique |h [electronic resource] : |b A Manual of Wet-Etched Silicon Structures / |c by Joachim Frühauf. |
| 250 | |a 1st ed. 2005. | ||
| 264 | 1 | |a Berlin, Heidelberg : |b Springer Berlin Heidelberg : |b Imprint: Springer, |c 2005. | |
| 300 | |a XII, 222 p. |b online resource. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 347 | |a text file |b PDF |2 rda | ||
| 505 | 0 | |a Technological Basis of Bulk-Silicon-Microtechnique -- Orientation Dependent Etching of Silicon -- General Overview of the Shape- and Functional Elements and the Procedure of their Design -- Simple Shape Elements -- Elements for Mechanical Applications -- Elements for Fluidic Applications -- Elements for Optical Applications. | |
| 520 | |a This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications. | ||
| 650 | 0 | |a Optical materials. | |
| 650 | 0 | |a Electronics. | |
| 650 | 0 | |a Ceramic materials. | |
| 650 | 0 | |a Telecommunication. | |
| 650 | 0 | |a Chemistry, Technical. | |
| 650 | 1 | 4 | |a Optical Materials. |
| 650 | 2 | 4 | |a Electronics and Microelectronics, Instrumentation. |
| 650 | 2 | 4 | |a Ceramics. |
| 650 | 2 | 4 | |a Microwaves, RF Engineering and Optical Communications. |
| 650 | 2 | 4 | |a Industrial Chemistry. |
| 710 | 2 | |a SpringerLink (Online service) | |
| 773 | 0 | |t Springer Nature eBook | |
| 776 | 0 | 8 | |i Printed edition: |z 9783642060489 |
| 776 | 0 | 8 | |i Printed edition: |z 9783540802037 |
| 776 | 0 | 8 | |i Printed edition: |z 9783540221098 |
| 856 | 4 | 0 | |u https://doi.uam.elogim.com/10.1007/b138230 |z Texto Completo |
| 912 | |a ZDB-2-CMS | ||
| 912 | |a ZDB-2-SXC | ||
| 950 | |a Chemistry and Materials Science (SpringerNature-11644) | ||
| 950 | |a Chemistry and Material Science (R0) (SpringerNature-43709) | ||