Dielectric Breakdown in Gigascale Electronics Time Dependent Failure Mechanisms /

This book focuses on the experimental and theoretical aspects of the time-dependent breakdown of advanced dielectric films used in gigascale electronics. Coverage includes the most important failure mechanisms for thin low-k films, new and established experimental techniques, recent advances in the...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Borja, Juan Pablo (Autor), Lu, Toh-Ming (Autor), Plawsky, Joel (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Cham : Springer International Publishing : Imprint: Springer, 2016.
Edición:1st ed. 2016.
Colección:SpringerBriefs in Materials,
Temas:
Optical materials.
Microtechnology.
Microelectromechanical systems.
Electronic circuits.
Nanotechnology.
Optical Materials.
Microsystems and MEMS.
Electronic Circuits and Systems.
Acceso en línea:Texto Completo
Tabla de Contenidos:
  • Introduction
  • General Theories
  • Measurement Tools and Test Structures
  • Experimental Techniques
  • Breakdown Experiments
  • Kinetics of Charge Carrier Confinement in Thin Dielectrics
  • Theory of Dielectric Breakdown in Nanoporous Thin Films
  • Dielectric Breakdown in Copper Interconnects
  • Reconsidering Conventional Models.

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