Nanofabrication Principles and Applications /
This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated...
Clasificación: | Libro Electrónico |
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Autor principal: | |
Autor Corporativo: | |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Cham :
Springer International Publishing : Imprint: Springer,
2016.
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Edición: | 1st ed. 2016. |
Colección: | SpringerBriefs in Materials,
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Temas: | |
Acceso en línea: | Texto Completo |
Tabla de Contenidos:
- Introduction
- Silicon Planar Processing and Photolithography
- Direct-write Lithography Approaches
- Stamping Methods
- Scanning-probe Methods
- Natural Lithography
- Direct-Growth and Self-assembly
- Practical Examples and Case Studies of Nanofabrication.