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|a 9783319317427
|9 978-3-319-31742-7
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|a 10.1007/978-3-319-31742-7
|2 doi
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|a 620.5
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|a Papadopoulos, Christo.
|e author.
|4 aut
|4 http://id.loc.gov/vocabulary/relators/aut
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|a Nanofabrication
|h [electronic resource] :
|b Principles and Applications /
|c by Christo Papadopoulos.
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|a 1st ed. 2016.
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|a Cham :
|b Springer International Publishing :
|b Imprint: Springer,
|c 2016.
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|a VI, 81 p. 41 illus., 31 illus. in color.
|b online resource.
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|a text
|b txt
|2 rdacontent
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|a computer
|b c
|2 rdamedia
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|a online resource
|b cr
|2 rdacarrier
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|a text file
|b PDF
|2 rda
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|a SpringerBriefs in Materials,
|x 2192-1105
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|a Introduction -- Silicon Planar Processing and Photolithography -- Direct-write Lithography Approaches -- Stamping Methods -- Scanning-probe Methods -- Natural Lithography -- Direct-Growth and Self-assembly -- Practical Examples and Case Studies of Nanofabrication.
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520 |
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|a This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated circuits, semiconductor quantum dots, metallic nanoparticles, carbon nanotubes, molecular structures, nanocomposites, arrays and superstructures. Nanofabrication applications in nanoelectronics, biotechnology, nanomechanical devices and nanophotonics will be examined. This brief will present the core concepts of nanofabrication relevant to researchers and industry in this important and rapidly evolving area.
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|a Nanotechnology.
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|a Electronics.
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|a Semiconductors.
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|a Nanoscience.
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|a Nanotechnology.
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|a Electronics and Microelectronics, Instrumentation.
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|a Semiconductors.
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|a Nanophysics.
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710 |
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|a SpringerLink (Online service)
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|t Springer Nature eBook
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|i Printed edition:
|z 9783319317403
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776 |
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|i Printed edition:
|z 9783319317410
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|a SpringerBriefs in Materials,
|x 2192-1105
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|u https://doi.uam.elogim.com/10.1007/978-3-319-31742-7
|z Texto Completo
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|a ZDB-2-CMS
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|a ZDB-2-SXC
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|a Chemistry and Materials Science (SpringerNature-11644)
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|a Chemistry and Material Science (R0) (SpringerNature-43709)
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