Ion Beams in Materials Processing and Analysis

A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning is treated in detail. Its applications in m...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Schmidt, Bernd (Autor), Wetzig, Klaus (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Vienna : Springer Vienna : Imprint: Springer, 2013.
Edición:1st ed. 2013.
Temas:
Surfaces (Technology).
Thin films.
Atoms.
Molecules.
Surfaces (Physics).
Surfaces, Interfaces and Thin Film.
Atomic, Molecular and Chemical Physics.
Surface and Interface and Thin Film.
Acceso en línea:Texto Completo
Tabla de Contenidos:
  • Preface
  • 1. Introduction
  • 2. Ion- Solid Interactions
  • 2.1 Fundamental Principles
  • 2.2 Binary Elastic Collisions
  • 2.3 Ion Stopping
  • 2.4 Ion Channeling
  • 2.5 Ion Induced Target Modifications
  • 3. Ion Beam Technology
  • 3.1 Principles of Ion Accelerators
  • 3.2 Ion Sources
  • 3.3 Ion Acceleration
  • 3.4 Ion Beam Handling
  • 3.5 Ion Implantation Systems
  • 3.6 Electrostatic Ion Accelerator Systems
  • 3.7 Focused Ion Beam Systems
  • 4. Materials Processing
  • 4.1 Ion Irradiation Effects in Crystalline Materials
  • 4.2 Ion Implantation into Semiconductors
  • 4.3 Ion Beam Synthesis of New Phases in Solids
  • 4.4 Ion Beam Mixing of Interfaces
  • 4.5 Ion Beam Slicing of Thin Layers (Smart-Cut for SOI and Solar Cells)
  • 4.6 Ion Beam Erosion, Sputtering and Surface Patterning (Ripples and Dots)
  • 4.7 Ion Beam Shaping of Nanomaterials
  • 4.8 Ion Beam Processing of other Materials
  • 5. Ion Beam Preparation of Materials
  • 5.1 Removal of Target Atoms by Sputtering
  • 5.2 Effects on Sputtering Yield
  • 5.3 Preparation Steps by Ion Beam Irradiation
  • 5.4 Focus Ion Beam (FIB) Preparation
  • 6. Ion Beam Analysis by Ion Beams
  • 6.1 Introduction
  • 6.2 Ion Beam Analytical Techniques - a Survey
  • 6.3 Ion Beam Scattering Techniques
  • 6.4 Ion Beam Induced Photon Emission
  • 6.5 Nuclear Reaction Analysis (NRA)
  • 6.6 Ion Beam Induced Electron and Light Emission
  • 6.7 Secondary Ion Emission
  • 6.8 Ion Beam Imaging Techniques
  • 7. Special Ion Beam Applications in Materials Analysis Problems
  • 7.1 Functional Thin Films and Layers
  • 7.2 Ion Beam Analysis in Art and Archeometry
  • 7.3 Special Applications in Life Sciences
  • Index.

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