Cargando…
Integration of Functional Oxides with Semiconductors
This unique book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices, and describes possible hybrid semiconductor/oxide sy...
| Clasificación: | Libro Electrónico |
|---|---|
| Autores principales: | , |
| Autor Corporativo: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
New York, NY :
Springer New York : Imprint: Springer,
2014.
|
| Edición: | 1st ed. 2014. |
| Temas: | |
| Acceso en línea: | Texto Completo |
Tabla de Contenidos:
- Introduction
- Critical issues in Oxide-Semiconductor Heteroepitaxy
- Predictive Engineering of Semiconductor-Oxide Interfaces
- Crystalline Functional Oxide Growth Methods
- Thin Oxide Film Characterization Methods
- Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy
- Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates
- Other Epitaxial Oxides on Semiconductors
- Outlook and Parting Thoughts
- Appendices.