Integration of Functional Oxides with Semiconductors

This unique book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices, and describes possible hybrid semiconductor/oxide sy...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Demkov, Alexander A. (Autor), Posadas, Agham B. (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York, NY : Springer New York : Imprint: Springer, 2014.
Edición:1st ed. 2014.
Temas:
Electronics.
Optical materials.
Semiconductors.
Electronics and Microelectronics, Instrumentation.
Optical Materials.
Acceso en línea:Texto Completo

MARC

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100 1 |a Demkov, Alexander A.  |e author.  |4 aut  |4 http://id.loc.gov/vocabulary/relators/aut 
245 1 0 |a Integration of Functional Oxides with Semiconductors  |h [electronic resource] /  |c by Alexander A. Demkov, Agham B. Posadas. 
250 |a 1st ed. 2014. 
264 1 |a New York, NY :  |b Springer New York :  |b Imprint: Springer,  |c 2014. 
300 |a X, 278 p. 146 illus., 113 illus. in color.  |b online resource. 
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337 |a computer  |b c  |2 rdamedia 
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505 0 |a Introduction -- Critical issues in Oxide-Semiconductor Heteroepitaxy -- Predictive Engineering of Semiconductor-Oxide Interfaces -- Crystalline Functional Oxide Growth Methods -- Thin Oxide Film Characterization Methods -- Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy -- Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates -- Other Epitaxial Oxides on Semiconductors -- Outlook and Parting Thoughts -- Appendices. 
520 |a This unique book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices, and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned functional oxides and semiconductors to identify material, device and characterization challenges, and to present the incredible potential in the realization of multifunctional devices and monolithic integration of materials and devices. This book also: ·         Discusses why semiconductor substrates are an excellent integration platform for making hybrid logic/sensor devices ·         Provides a brief introduction to the methods accessible to non-experts, before going into details of interest to the experts ·         Includes a detailed glossary that explains the specialized terminology and provides insight into the terminology and how it's used. 
650 0 |a Electronics. 
650 0 |a Optical materials. 
650 0 |a Semiconductors. 
650 1 4 |a Electronics and Microelectronics, Instrumentation. 
650 2 4 |a Optical Materials. 
650 2 4 |a Semiconductors. 
700 1 |a Posadas, Agham B.  |e author.  |4 aut  |4 http://id.loc.gov/vocabulary/relators/aut 
710 2 |a SpringerLink (Online service) 
773 0 |t Springer Nature eBook 
776 0 8 |i Printed edition:  |z 9781461493198 
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912 |a ZDB-2-SXE 
950 |a Engineering (SpringerNature-11647) 
950 |a Engineering (R0) (SpringerNature-43712) 

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