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Copper Electrodeposition for Nanofabrication of Electronics Devices

This book discusses the scientific mechanism of copper electrodeposition and it's wide range of applications. The book will cover everything from the basic fundamentals to practical applications. In addition, the book will also cover important topics such as: • ULSI wiring material based upon c...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor Corporativo: SpringerLink (Online service)
Otros Autores: Kondo, Kazuo (Editor ), Akolkar, Rohan N. (Editor ), Barkey, Dale P. (Editor ), Yokoi, Masayuki (Editor )
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York, NY : Springer New York : Imprint: Springer, 2014.
Edición:1st ed. 2014.
Colección:Nanostructure Science and Technology, 171
Temas:
Acceso en línea:Texto Completo

MARC

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245 1 0 |a Copper Electrodeposition for Nanofabrication of Electronics Devices  |h [electronic resource] /  |c edited by Kazuo Kondo, Rohan N. Akolkar, Dale P. Barkey, Masayuki Yokoi. 
250 |a 1st ed. 2014. 
264 1 |a New York, NY :  |b Springer New York :  |b Imprint: Springer,  |c 2014. 
300 |a VIII, 282 p. 190 illus., 75 illus. in color.  |b online resource. 
336 |a text  |b txt  |2 rdacontent 
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490 1 |a Nanostructure Science and Technology,  |x 2197-7976 ;  |v 171 
505 0 |a Copper Electrodeposition -- Suppression Effect and Additive Chemistry -- Acceleration Effect -- Modeling and Simulation -- Frontiers of Cu Electrodeposition and Electroless Plating for On-Chip Interconnects -- Microstructure of Evolution of Copper in Nano-scale Interconnect Features -- Direct Copper Plating -- Through Silicon Via -- Build-up Printed Wiring Boards -- Copper Foil Smooth on Both Sides for Lithium Ion Battery -- Through Hole Plating. 
520 |a This book discusses the scientific mechanism of copper electrodeposition and it's wide range of applications. The book will cover everything from the basic fundamentals to practical applications. In addition, the book will also cover important topics such as: • ULSI wiring material based upon copper nanowiring • Printed circuit boards • Stacked semiconductors • Through Silicon Via • Smooth copper foil for Lithium-Ion battery electrodes This book is ideal for nanotechnologists, industry professionals, and practitioners. 
650 0 |a Electrochemistry. 
650 0 |a Nanotechnology. 
650 0 |a Electronics. 
650 0 |a Condensed matter. 
650 1 4 |a Electrochemistry. 
650 2 4 |a Nanotechnology. 
650 2 4 |a Electronics and Microelectronics, Instrumentation. 
650 2 4 |a Condensed Matter Physics. 
700 1 |a Kondo, Kazuo.  |e editor.  |4 edt  |4 http://id.loc.gov/vocabulary/relators/edt 
700 1 |a Akolkar, Rohan N.  |e editor.  |4 edt  |4 http://id.loc.gov/vocabulary/relators/edt 
700 1 |a Barkey, Dale P.  |e editor.  |4 edt  |4 http://id.loc.gov/vocabulary/relators/edt 
700 1 |a Yokoi, Masayuki.  |e editor.  |4 edt  |4 http://id.loc.gov/vocabulary/relators/edt 
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830 0 |a Nanostructure Science and Technology,  |x 2197-7976 ;  |v 171 
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912 |a ZDB-2-SXC 
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950 |a Chemistry and Material Science (R0) (SpringerNature-43709)