Helium Ion Microscopy Principles and Applications /

Helium Ion Microscopy: Principles and Applications describes the theory and discusses the practical details of why scanning microscopes using beams of light ions - such as the Helium Ion Microscope (HIM) - are destined to become the imaging tools of choice for the 21st century. Topics covered includ...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Joy, David C. (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York, NY : Springer New York : Imprint: Springer, 2013.
Edición:1st ed. 2013.
Colección:SpringerBriefs in Materials,
Temas:
Materials-Analysis.
Spectrum analysis.
Nanotechnology.
Nanoscience.
Characterization and Analytical Technique.
Spectroscopy.
Nanophysics.
Acceso en línea:Texto Completo
Tabla de Contenidos:
  • Chapter 1: Introduction to Helium Ion Microscopy
  • Chapter 2: Microscopy with Ions  - A brief history
  • Chapter 3: Operating the Helium Ion Microscope
  • Chapter 4: Ion -Solid  Interactions  and Image Formation
  • Chapter 5: Charging and  Damage
  • Chapter 6: Microanalysis with the HIM
  • Chapter 7: Ion Generated Damage
  • Chapter 8: Working with other Ion beams
  • Chapter 9: Patterning and Nanofabrication
  • Conclusion
  • Bibliography
  • Appendix: iSE Yields,  and IONiSE  parameters for  He+ excitation  of Elements and Compounds
  • Index.

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